A new generation of CVS monitors Cu damascene plating baths

Solid State Technology

Volumn 46, Issue 3, 2003, Pages 57-60

  Pavlov, Michael ^a   Shalyt, Eugene ^a   Bratin, Peter ^a  

^a ECI Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER PLATING; CYCLIC VOLTAMMETRY; DUCTILITY; ELECTROLYTES; ELECTROPLATING; HARDNESS; INTEGRATED CIRCUITS; MASS TRANSFER; TENSILE STRENGTH;

CYCLIC VOLTAMMETRIC STRIPPING (CVS);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037348066     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

References (1)

1. P. Bratin, et al, Semicondutor Fabtech, 14th Edition, Summer 2001.