Superhard coating materials

MRS Bulletin

Volumn 28, Issue 3, 2003, Pages 164-165

  Chung, Yip Wah ^a   Sproul, William D ^b  

^a NORTHWESTERN UNIVERSITY   (United States)

^b Advanced Energy Industries Incorporated   (United States)

Author keywords

Carbon nitride; Cubic boron nitride; Nanocomposites; Nanometer scale multilayered coatings; Superhard coating materials; Superhard oxide materials; Thin films

Indexed keywords

CARBON NITRIDE; CHEMICAL VAPOR DEPOSITION; DIAMONDS; FULLERENES; HARDNESS; NANOSTRUCTURED MATERIALS; THIN FILMS;

SUPERHARD COATING MATERIALS;

COATINGS;

EID: 0037343455     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2003.56     Document Type: Article

References (2)

1. U. Helmersson, S. Todorova, S.A. Barnett, J.-E. Sundgren, L.C. Markert, and J.E. Greene, J. Appl. Phys. 62 (1987) p. 481.
2. A.Y. Liu and M.L. Cohen, Phys. Rev. B 41 (1990) p. 10727.