Sputtering in a glow discharge lamp of the Grimm type

EPJ Applied Physics

Volumn 21, Issue 3, 2003, Pages 213-223

  Grais, K I ^a   Eid, M A ^a   Al Ashkar, E A ^a   Eid, K A ^a   Abd El Aal, M S ^a  

^a NATIONAL RESEARCH CENTRE   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CURRENT VOLTAGE CHARACTERISTICS; DISCHARGE LAMPS; GLOW DISCHARGES; INDUCTIVELY COUPLED PLASMA; PRESSURE EFFECTS;

GRIMM TYPE LAMP; MOMENTUM TRANSFER;

SPUTTER DEPOSITION;

EID: 0037338251     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2003005     Document Type: Article

References (27)

1. R. Payling, D.G. Jounes, A. Bongtson, Glow Discharge Optical Emission Spectroscopy (John Wiley, Chichester, 1997), pp. 260, 267
2. G.K. Wehner, Advance in Electronics and Electron Physics (Academic Press, New York, 1955)
3. G.K. Wehner, G.S. Anderson, Handbook of Thin Film Technology, edited by L.I. Maissel, R. Glang (Mc Graw-Hill, New York, 1970), Chap. 3 and 4
4. W.D. Westwook, Progress in Surface Science (Pergamon, Oxford, 1976), p. 71
5. F. Llewellyn Jones, The Glow Discharge (Metheun Longdon, Wiley, New York, 1966)
6. G. Francis, The Glow Discharge at Low Pressure (Handbuch der Physik, 1956), Vol. 22, p. 92
7. M. Kaminsky, Atomic and Ionic Impact Phenomena on Metal Surfaces (Acad. Press, New York, 1963), p. 142
8. H.S.W. Messey, E.H. Burhop, Electronic and Ionic Impact Phenomenon (Oxford Univ. Press, London, 1956), p. 578
9. G. Canter, J.S. Colligan, Ion Bombardment of Solids (Elsevier, New York, 1968), Chap. 7
10. P.D. Townsend, J.C. Kelly, N.E.W. Hartly, Ion Implantation, Sputtering and Theoretical Application (Acad. Press, London, 1976), Chap. 6
11. E. Langberg, Phys. Rev. 11, 91 (1958)
12. S.A. Schwartz, J. Vac. Sci. Technol. A 6, 2069 (1988)
13. R. Payling, Surf. Interface Anal. 21, 792 (1994)
14. R. Payling, Spectroscopy 13, 36 (1998)
15. K. Wagatsuma, K. Hirokawa, Surf. Interface Anal. 21, 631 (1994)
16. K. Takatsu, T. Toda, Proceeding of the 5th International Conference on Ionization Phenomena in Gases, Munich, 1961 edited by Maedeer, Vol. I and II
17. P.W.J.M. Boumans, Anal. Chem. 44, 1219 (1972)
18. K.I. Grais, A.M. Bastawros, E.A. Al-Ashkar, K.A. Eid, Eur. Phys. J. AP 15, 213 (2001)
19. G.L. Weissler, R.W. Carlson, Vacuum Physics and Technology (Academic Press, London, 1979), Vol. 14, p. 560
20. I.R. Videnovic, N. Konjevic, M.M. Kuraica, Spectrochem. Acta B 51, 1707 (1996)
21. M. Dogan, K. Laqua, H. Massman, Spectrochem. Acta B 26, 631 (1971)
22. F. Leis, E.B.F. Steers, Spectrochem. Acta B 49, 289 (1994)
23. W. Grimm, Spectrochem. Acta B 23, 443 (1968)
24. C.J. Belle, J.D. Johnson, Appl. Spectrosc. 27, 118 (1973)
25. S.D. Dahlgren, E.D. Mc Clanahan, J.W. Johnson, A. Groybeal, J. Vac. Sci. Technol. 7, 398 (1970)
26. J.W. Pallen, E.D. Mc Clanahan, J. Appl. Phys. 43, 4811 (1972)
27. P. Sigmund, Phys. Rev. 184, 383 (1969)