Ion-beam irradiation effect on solid-phase growth of β-FeSi2

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 16, Issue 3-4, 2003, Pages 505-508

  Murakami, Y ^a   Kido, H ^a   Kenjo, A ^a   Sadoh, T ^a   Yoshitake, T ^a   Miyao, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

FeSi2; Atomic mixing; Nano fabrication; Pre amorphization

Indexed keywords

ANNEALING; ARGON; AUGER ELECTRON SPECTROSCOPY; ENERGY GAP; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; IRRADIATION; NANOTECHNOLOGY; PHASE TRANSITIONS; POSITIVE IONS; SEMICONDUCTOR GROWTH; SILICON WAFERS; X RAY DIFFRACTION ANALYSIS;

ATOMIC MIXING;

IRON COMPOUNDS;

EID: 0037336985     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00641-0     Document Type: Conference Paper

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