Design and performances of a one-degree-of-freedom guided nano-actuator

Robotics and Computer-Integrated Manufacturing

Volumn 19, Issue 1-2, 2003, Pages 89-98

  Lambert, P ^a   Valentini, A ^a,b   Lagrange, B ^a   De Lit, P ^a   Delchambre, A ^a  

^a UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

^b POLITECNICO DI MILANO   (Italy)

Author keywords

Nano positioning; Piezoelectricity; Stick slip

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); MOTION CONTROL; PIEZOELECTRIC DEVICES; PRECISION ENGINEERING; PROGRAM TRANSLATORS; SOFTWARE PROTOTYPING;

GUIDING SYSTEMS; NANOACTUATORS;

COMPUTER INTEGRATED MANUFACTURING;

EID: 0037326166     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0736-5845(02)00065-0     Document Type: Conference Paper

References (17)

1. Zesch W. Multi-degree-of-freedom micropositioning using stepping principles. Technical report. Swiss Federal Institute of Technology, ETHZ, Zürich, Switzerland, 1997.
2. Devos D. Conception et réalisation d'un micro-actionnneur en alliage à mémoire de forme, Master's thesis, Université libre de Bruxelles, Brussels, Belgium, June 2001.
3. Madou M. Fundamentals of Microfabrication. 1997;CRC Press, Boca Raton, FL.
4. Hirose S. Biologically inspired robots - snake-like locomotors and manipulators. 1993;Oxford Sciences Publications, Oxford, UK.
5. Elwenspoek M., Wiegerink R. Mechanical microsensors. 2001;Springer, Berlin.
6. Minotti P., Ferrera A. Les micromachines. 1998;Hermès, Paris, France.
7. van Randeraat J, Setterington RE, editors. Piezoelectric ceramics. Eindhoven, The Netherlands: Mullard Limited, 1968.
8. Patoor E., Berveiller M. Technologie des alliages à mémoire de forme. 1994;Hermès, Paris, France.
9. Hicks T.R., Atherton P.D. The nano positioning book. 1997;Penton Press, London, UK.
10. Physik Instrumente. Headquarters for Belgium seated by Applied Laser Technology BV, The Netherlands. MicroPositioning, NanoPositioning, NanoAutomation, 2001.
11. Baumann D. Hochauflösender Mechanismus zum positionieren eines Rotors. Swiss Patent No. 1485/95-9, 1995.
12. Breguet J-M, Clavel R. New designs for long range, high resolution, multi-degree-of-freedom piezoelectric actuators. In: Actuator 98, Sixth International Conference on New Actuators, Bremen, Germany, 1998. p. 198-201.
13. Breguet J.-.M., Renaud P. A 4-degrees-of-freedom microrobot with nanometer resolution. Robotica. 14:1996;199-203.
14. Darby A.P., Pellegrino S. Modeling and control of a flexible structure incorporating inertial stick-slip actuators. J Guidance Control Dyn. 22:1999;36-43.
15. www.ferroperm-piezo.com.
16. Breguet JM. Actionneurs "stick and slip" pour micro-manipulateurs. Ph.D. thesis, École polytechnique fédérale de Lausanne, Lausanne, Switzerland, 1998.
17. Johnson K.L. Contact mechanics. 1985;Cambridge University Press, Cambridge, UK.