Study of Ni-silicide-mediated crystallization of a-Si by spectroscopic ellipsometry

Journal of the Korean Physical Society

Volumn 42, Issue SPEC., 2003, Pages

  Kim, T J ^a   Kim, Y D ^a   Kim, K H ^a   Sohn, W S ^a   Jang, J ^a  

^a Kyung Hee University   (South Korea)

Author keywords

Crystallization; Ellipsometry; EMA; Poly Si

Indexed keywords

EID: 0037306710     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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