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Volumn 98, Issue 1-2, 2003, Pages 41-45
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Integrated process chains in microproduction;Integrierte prozessketten in der mikrofertigung
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Author keywords
[No Author keywords available]
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Indexed keywords
FLUIDICS;
INTEGRATED CONTROL;
MICROELECTRONICS;
PRODUCTION;
MICRO-FLUIDICS;
PRODUCTION ENGINEERING;
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EID: 0037300683
PISSN: 09470085
EISSN: None
Source Type: Journal
DOI: 10.3139/104.100609 Document Type: Review |
Times cited : (1)
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References (10)
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