GC/MS analyses of MOVPE precursors and characterization of impurities in trimethylindium, trimethylaluminum and bis(cyclopentadienyl)magnesium

Journal of Crystal Growth

Volumn 248, Issue , 2003, Pages 82-85

  Grant, William B ^a   Amamchyan, Artashes ^a   Stennick, Robert S ^a   Shenai, Deo V ^a  

^a SHIPLEY COMPANY   (United States)

Author keywords

A3. Metalorganic vapor phase epitaxy; B1. Bis(cyclopentadienyl)magnesium; B1. Trimethylaluminum; B1. Trimethylindium

Indexed keywords

CHROMATOGRAPHY; FILM GROWTH; LIGHT EMITTING DIODES; MASS SPECTROMETRY; METALLORGANIC VAPOR PHASE EPITAXY; STAINLESS STEEL;

VOLTILE FRACTIONS;

PURIFICATION;

EID: 0037292509     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01898-5     Document Type: Article

References (4)

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2. D.V. Shenai, M.L. Timmons, R.L. DiCarlo, G.K. Lemnah, R.S. Stennick, Proceedings of the 11th International Conference on Metalorganic Vapor Phase Epitaxy, 2002.
3. Bartram M.E. Anal. Chem. 73:2001;535.
4. P.J. Baugh, et al., Chemtronics, Vol. 2, 1987.