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Volumn 238-239, Issue , 2003, Pages 3-8
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Development of a multifunctional micro-machining system and its applications
a a a a a |
Author keywords
Desktop system; Mechanical micro machining; Micro lens mold; Multifunction
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Indexed keywords
BUFFING;
DIES;
ELECTRON DEVICE MANUFACTURE;
GRINDING (MACHINING);
LASER APPLICATIONS;
LENSES;
MICROELECTROMECHANICAL DEVICES;
MILLING (MACHINING);
POLISHING;
SYSTEMS ANALYSIS;
THREE DIMENSIONAL;
TURNING;
DESKTOP SYSTEM;
LASER MACHINING;
MICRO LENS MOLD;
MICRO LENS MOLD FABRICATION;
MICRO MILLING;
MULTIFUNCTIONAL MICROMACHINING SYSTEMS;
MICROMACHINING;
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EID: 0037287903
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: None Document Type: Article |
Times cited : (5)
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References (2)
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