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Volumn 238-239, Issue , 2003, Pages 383-388
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Development of a micro machining technology for fabrication of micro parts
a b b a a |
Author keywords
End milling; Grooving; Mechanical micro fabrication system; Micro cutting; Micro mold; Micro parts
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Indexed keywords
ABRASIVE CUTTING;
FABRICATION;
MACHINE TOOLS;
MICROELECTROMECHANICAL DEVICES;
FLAT ENDMILL TOOL;
MICRO MACHINING TECHNOLOGY;
MICRO PARTS;
MICROGROOVES;
ROTATION TOOLS;
ULTRA PRECISION MICRO FABRICATION SYSTEM;
MICROMACHINING;
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EID: 0037287626
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: 10.4028/www.scientific.net/kem.238-239.383 Document Type: Article |
Times cited : (4)
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References (3)
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