Ultraprecision fabrication of glass ceramic aspherical mirrors by ELID-grinding with a nano-level positioning hydrostatic drive system

Key Engineering Materials

Volumn 238-239, Issue , 2003, Pages 49-52

  Suzuki, T ^a   Ohmori, H ^a   Dai, Y ^a   Lin, W ^a   Katahira, K ^a   Makinouchi, A ^a   Tashiro, H ^a   Yokota, H ^b   Suzuki, M ^b   Abe, T ^b   Shimasaki, T ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b CANON INC   (Japan)

Author keywords

ELID grinding; On machine measurement; Paraboloidal; Ultraprecision; Zerodur

Indexed keywords

ASPHERICS; CERAMIC MATERIALS; ELECTROPLATING; GLASS; GRINDING (MACHINING); MACHINE TOOLS; NANOSTRUCTURED MATERIALS; POLISHING; SPACE RESEARCH; SPATIAL VARIABLES MEASUREMENT;

ELECTROLYTIC IN PROCESS DRESSING; GLASS CERAMIC ASPHERICAL MIRRORS; PARABOLOIDAL MIRROR; ULTRAPRECISION FABRICATION;

MIRRORS;

EID: 0037285434     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.238-239.49     Document Type: Article

References (4)

1. H. Ohmori et al; Academic Lecture Meeting (JSPE), 2002, pp. 539.
2. H. Ohmori: Electrolytic in-process dressing (ELID) grinding technique for ultraprecision mirror surface machining, International journal of the JSPE, 1992, 26(4), p278-278.
3. H. Ohmori et al: Die & Mould Technology, 2002, Vol.17, No.8, p82-83.
4. H. Ohmori et al: Die & Mould Technology, 2002, Vol.17, No.3, p24-25.