Fabrication of electroplated micro grinding wheels and manufacturing of microstructures with ultrasonic vibration

Key Engineering Materials

Volumn 238-239, Issue , 2003, Pages 9-14

  Onikura, Hiromichi ^a   Inoue, Ryuuichi ^b   Okuno, Keitaro ^a   Ohnishi, Osamu ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

Carbide substrate; Drilling; Electrolytic degreasing; Electroplated micro diamond grinding wheel; Grooving; Microstructures; Ultrasonic vibration

Indexed keywords

CARBIDES; DIAMONDS; DRILLING; ELECTROPLATING; MICROMACHINING; MICROSTRUCTURE; SILICON; STAINLESS STEEL; SUBSTRATES; ULTRASONICS; VIBRATIONS (MECHANICAL);

DIAMOND GRITS; ELECTROLYTIC DEGREASING; ELECTROPLATED MICRO DIAMOND GRINDING WHEELS; GROOVING; MICRO STRUCTURED SURFACES;

GRINDING WHEELS;

EID: 0037284860     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.238-239.9     Document Type: Article

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