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Volumn 74, Issue 1 II, 2003, Pages 578-581
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Photothermal and electronic elastic effects in microelectromechanical structures
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Author keywords
[No Author keywords available]
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Indexed keywords
BENDING (DEFORMATION);
ELASTIC WAVES;
FREQUENCY MODULATION;
MICROSTRUCTURE;
PHOTOACOUSTIC EFFECT;
PLASMA WAVES;
ELASTIC EFFECTS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0037280516
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1520324 Document Type: Conference Paper |
Times cited : (74)
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References (10)
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