Is the effective accommodation coefficient of the spinning rotor gauge temperature dependent?

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 318-324

  Jousten, Karl ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; NUMERICAL METHODS; PRESSURE MEASUREMENT; SPECIFIC HEAT; TEMPERATURE; THERMAL EFFECTS; THERMAL EXPANSION; THERMODYNAMIC STABILITY;

CAPACITANCE DIAPHRAGM GAUGES; KNUDSEN NUMBER; MAXWELLIAN GAS; SPINNING ROTOT GAUGE; TEMKIN ISOTHERMS; THERMAL EXPANSION COEFFICIENT;

VACUUM GAGES;

EID: 0037277067     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1531649     Document Type: Article

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