Convertibility of conductivity type in reactively sputtered ZnO thin films

Physica Status Solidi (A) Applied Research

Volumn 195, Issue 1 SPEC, 2003, Pages 165-170

  Tuzemen S ^a   Doǧan, Seydi ^a   Ateş, Aytunç ^a   Yildirim, M ^a   Xiong, Gang ^b   Wilkinson, John ^b   Williams, R T ^b  

^a ATATÜRK UNIVERSITY   (Turkey)

^b WAKE FOREST UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CHARGE; ELECTRIC CONDUCTIVITY; SPUTTERING; THERMAL EFFECTS; ZINC OXIDE;

HOLE CONCENTRATIONS;

THIN FILMS;

EID: 0037274753     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306290     Document Type: Conference Paper

References (20)

1. D. C. Look, J. W. Hemsky, and J. R. Sizelove, Phys. Rev. Lett. 82, 2552 (1999).
2. D. C. Look, Mater. Sci. Eng. B 80, 383 (2001).
3. B. J. Jin, S. H. Bae. S. Y. Lee, and S. Im, Mater. Sci. Eng. B 71, 301 (2000).
4. A. Pöppl and G. Völkel, phys. stat. sol. (a) 125, 571 (1991).
5. C. G. Van de Wallc, Physica B 308-310, 899 (2001).
6. C. Gonzalez. D. Galland, and A. Herve, phys. stat. sol. (b) 72, 309 (1975).
7. V. Soriano and D. Galland, phys. stat. sol. (b) 77, 739 (1976).
8. J. S. Lord and S. P. Cottrell, Physica B 308-310, 920 (2001).
9. S. A. Studenkin. N. Golego. and M. Cocivera, J. Appl. Phys. 87, 2413 (2000).
10. S. Choopun, R. D. Vispute, W. Nock, A. Balsamo, R. P. Sharma, T. Venkatesan. A. Iliadis, and D. C. Look, Appl. Phys. Lett. 75, 3947 (1999).
11. G. Xiong, J. Wilkinson, B. Mischuck. S. Tüzemen, K. B. Üçer, and R. T. Williams, Appl. Phys. Lett. 80, 1195 (2002).
12. F. Quaranta, A. Valentini, F. R. Rizzi, and G. Casamassima, J. Appl. Phys. 74, 244 (1993).
13. M. Joseph. H. Tabata, and T. Kawai, Jpn. J. Appl. Phys. 38, L1205 (1999).
14. T. Yamamoto and H. Katayama-Yoshida, Jpn. J. Appl. Phys. 38, L166 (1999).
15. T. V. Butkhuzi, A. V. Bureyev, A. N. Georgobiani, N. P. Kekelidze, and T. G. Khulordva, J. Cryst. Growth 117, 366 (1992).
16. G. Gordillo, J. Olarte, and C. Calderon, phys. stat. sol. (b) 220, 293 (2000).
17. K. Vanheusden. C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, Appl. Phys. Lett. 68, 403 (1996).
18. D. J. Chadi and K. J. Chang, Phys. Rev. Lett. 60, 2187 (1988).
19. F. Leiter. H. Zhou, F. Heneckcr, A. Hofstaetter, D. M. Hofmann, and B. K. Meyer, Physica B 308-310, 908 (2001).
20. J. S. Blakemore. Solid State Physics, 2nd edited by. (Cambridge University Press, Cambridge, 1989), p. 323.