Preparation of microporous ORMOSILs by thermal degradation of organically modified siloxane resin

Journal of Sol-Gel Science and Technology

Volumn 26, Issue 1-3, 2003, Pages 407-412

  Ou, Duan Li ^a   Chevalier, Pierre M ^a   Mackinnon, Iain A ^a   Eguchi, Katsuya ^a   Boisvert, Ronald ^a   Su, Kai ^a  

^a DOW CORNING LTD   (United Kingdom)

Author keywords

Low k ILD material; Organically modified silicone resin; Porous ORMOSIL; Thermal degradation

Indexed keywords

DIELECTRIC FILMS; MICROPOROUS MATERIALS; PERMITTIVITY; PYROLYSIS; SILICON COMPOUNDS; SOL-GELS; THIN FILMS;

SILOXANE RESINS;

RESINS;

EID: 0037271488     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020737618745     Document Type: Conference Paper

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