Spectroellipsometric characterization of multilayer sol-gel Fe2O3 films

Journal of Sol-Gel Science and Technology

Volumn 26, Issue 1-3, 2003, Pages 745-748

  Gartner, Mariuca ^a   Crisan, Maria ^a   Jitianu, A ^a   Scurtu, R ^a   Gavrila, Raluca ^b   Oprea, Isabella ^b   Zaharescu, Maria ^a  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

Fe2O3 films; Multilayer deposition; Optical characterization; Spectroscopic ellipsometry

Indexed keywords

ANISOTROPY; ATOMIC FORCE MICROSCOPY; BIREFRINGENCE; CRYSTALLIZATION; DEPOSITION; ELLIPSOMETRY; GLASS; HEAT TREATMENT; MICROSTRUCTURE; REFRACTIVE INDEX; SOL-GELS; SPECTROSCOPIC ANALYSIS;

MULTILAYER DEPOSITION;

METALLIC FILMS;

EID: 0037268217     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020706423230     Document Type: Conference Paper

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