Design, fabrication, and testing of an integrated Si-based light modulator

Journal of Lightwave Technology

Volumn 21, Issue 1, 2003, Pages 228-235

  Sciuto, Antonella ^a   Libertino, Sebania ^b   Alessandria, Antonio ^c   Coffa, Salvo ^c   Coppola, Giuseppe ^d  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMM   (Italy)

^c STMICROELECTRONICS   (Italy)

^d CNR   (Italy)

Author keywords

Bipolar transistor; Electrooptic modulation; FET; Modulators; Optoelectronic devices; Semiconductor waveguides

Indexed keywords

BIPOLAR TRANSISTORS; COMPUTER SIMULATION; FIELD EFFECT TRANSISTORS; INTEGRATED OPTOELECTRONICS; LIGHT MODULATION; MICROSCOPIC EXAMINATION; OPTICAL DESIGN; OPTICAL TESTING; PLASMAS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; WAVEGUIDES;

CLEAN ROOM PROCESSING; ELECTROOPTIC MODULATION; PLASMA DISTRIBUTION; SEMICONDUCTOR WAVEGUIDES;

LIGHT MODULATORS;

EID: 0037261564     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.808608     Document Type: Article

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