Packaging effects on the performances of MEMS for high-G accelerometer with double-cantilevers

Sensors and Actuators, A: Physical

Volumn 102, Issue 3, 2003, Pages 268-278

  Huang, Weidong ^a   Cai, Xia ^a   Xu, Bulu ^a   Luo, Le ^a   Li, Xinxin ^a   Cheng, Zhaonian ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Frequency domain analysis; High G accelerometer; Sensor packaging; Time domain analysis

Indexed keywords

ACCELERATION; ACCELEROMETERS; ELASTIC MODULI; FINITE ELEMENT METHOD; FREQUENCY DOMAIN ANALYSIS; TIME DOMAIN ANALYSIS;

HIGH-G ACCELEROMETER; SENSOR PACKAGING;

MICROELECTROMECHANICAL DEVICES;

EID: 0037238218     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00391-6     Document Type: Article

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