A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator - Part II: Theoretical analysis

Precision Engineering

Volumn 27, Issue 1, 2003, Pages 22-31

  Liu, Yung Tien ^a   Higuchi, Toshiro ^b   Fung, Rong Fong ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Impact force; Piezoelectric element; Precision positioning; Spring

Indexed keywords

COMPUTER SIMULATION; PIEZOELECTRIC DEVICES; PRECISION ENGINEERING; SPRINGS (COMPONENTS); VIBRATIONS (MECHANICAL);

IMPACT FORCE;

ACTUATORS;

EID: 0037219814     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00181-2     Document Type: Article

References (10)

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