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Volumn 186, Issue 1-4, 2002, Pages 179-183
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Laser-assisted growth of molybdenum rods
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Author keywords
Laser assisted CVD; MEMS; Molybdenum rods
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Indexed keywords
ACTIVATION ENERGY;
AUGER ELECTRON SPECTROSCOPY;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL GROWTH;
ENERGY DISPERSIVE SPECTROSCOPY;
HYDROGEN;
LASER BEAMS;
PARTIAL PRESSURE;
REDUCTION;
SCANNING ELECTRON MICROSCOPY;
MOLYBDENUM RODS;
MOLYBDENUM;
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EID: 0037185134
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(01)00619-5 Document Type: Article |
Times cited : (7)
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References (16)
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