Photo-lithography for 2D optical microstructures in porous silicon: Application to nucleation of macropores

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 588-593

  Setzu, S ^a,b   Ferrand, P ^a   Lerondel G ^a   Romestain, R ^a  

^a UNIV GRENOBLE ALPES   (France)

^b INFM   (Italy)

Author keywords

Hexagonal patterning; Holography; Macropores; Photo lithography; Porous silicon

Indexed keywords

DISSOLUTION; HOLOGRAPHY; HYDROFLUORIC ACID; LASER BEAM EFFECTS; MICROSTRUCTURE; NUCLEATION; PHOTOLITHOGRAPHY; POROSITY;

MACROPORES; OPTICAL MICROSTRUCTURES;

POROUS SILICON;

EID: 0037185122     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00692-4     Document Type: Conference Paper

References (17)