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Volumn 186, Issue 1-4, 2002, Pages 578-582
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Fabrication of photoluminescent Si-based layers by air optical breakdown near the silicon surface
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Author keywords
Optical breakdown; Photoluminescence; Silicon nanostructures
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Indexed keywords
CARBON DIOXIDE LASERS;
LASER APPLICATIONS;
PHOTOLUMINESCENCE;
PLASMAS;
SILICON WAFERS;
OPTICAL BREAKDOWN;
NANOSTRUCTURED MATERIALS;
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EID: 0037185121
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(01)00690-0 Document Type: Conference Paper |
Times cited : (21)
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References (13)
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