Nitriding of aluminum by using supersonic expanding plasma jets

Vacuum

Volumn 65, Issue 3-4, 2002, Pages 403-408

  Ando, Y ^a   Tobe, S ^a   Tahara, H ^b   Yoshikawa, T ^b  

^a ASHIKAGA INSTITUTE OF TECHNOLOGY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Aluminum nitride; Plasma nitriding; Supersonic expanding plasma jet; Surface modification; Thermal plasma

Indexed keywords

INFILTRATION; MELTING; NITRIDING; PLASMA JETS; SUBSTRATES; SURFACE TREATMENT; VAPORIZATION;

SUPERSONIC EXPANDING PLASMA JETS;

ALUMINUM;

EID: 0037182050     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00449-3     Document Type: Conference Paper

References (8)