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Volumn 96, Issue 1-3, 2002, Pages 193-211

Thin wetting films from aqueous electrolyte solutions on SiC/Si wafer

Author keywords

Disjoining pressure; Microinterferometric thickness measurement; Silicon carbide; Thin wetting films

Indexed keywords

COAGULATION; INTERFEROMETRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE; SILICON WAFERS; SOLUTIONS; SUBSTRATES; SURFACE CHEMISTRY; THICKNESS MEASUREMENT; THIN FILMS;

EID: 0037169952     PISSN: 00018686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0001-8686(01)00081-1     Document Type: Review
Times cited : (41)

References (38)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.