Deposition of low-resistivity ITO on plastic substrates by DC arc-discharge ion plating

Thin Solid Films

Volumn 411, Issue 1, 2002, Pages 28-31

  Niino, Fumihito ^a   Hirasawa, Hiroshi ^a   Kondo, Ken Ichi ^a  

^a STANLEY ELECTRIC CO LTD   (Japan)

Author keywords

DC arc discharge ion plating; ITO; Low resistivity

Indexed keywords

DEFORMATION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; GRAIN SIZE AND SHAPE; INDIUM COMPOUNDS; PLASTICS; PLATING; POLYCRYSTALLINE MATERIALS; SILICONE COATINGS; TIN COMPOUNDS;

ARC-DISCHARGE ION PLATING;

THIN FILMS;

EID: 0037157435     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00168-2     Document Type: Conference Paper

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