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Volumn 487, Issue 3, 2002, Pages 308-313

Properties of groove chambers

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; COST EFFECTIVENESS; LASER APPLICATIONS; LITHOGRAPHY; METAL FOIL; PLASMA ETCHING; POLYMERIZATION;

EID: 0037151169     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(01)02170-2     Document Type: Article
Times cited : (2)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.