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Journal of Physics D: Applied Physics

Volumn 35, Issue 10, 2002, Pages 973-980

Electron attachment kinetics coupled to electron thermalization in SF6/Ar mixtures

(2) Shizgal, Bernie D a,c Kowari, Ken Ichi b

a HOKKAIDO UNIVERSITY (Japan)

b University of British Columbia ^* (Japan)

c UNIVERSITY OF BRITISH COLUMBIA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; CHEMICAL RELAXATION; ELECTRONS; FUNCTIONS; MIXTURES; REACTION KINETICS; SULFUR COMPOUNDS;

ELECTRON ATTACHMENT; THERMALIZATION;

ELECTRON GAS;

EID: 0037150354 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/35/10/305 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.