SCOPUS 정보 검색 플랫폼

International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 1127-1131

Amorphous carbon nitride thin film as a barrier against copper diffusion

(6) Ning, Jiang a Xu, S a Chai, J W a Chen, L K a See, Alex b Ahn, J c

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b CHARTERED SEMICONDUCTOR MANUFACTURING LTD (Singapore)

c NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; COPPER; GRAPHITE; NITROGEN; NITROGEN DERIVATIVE; SILICON; UNCLASSIFIED DRUG;

CHEMICAL ANALYSIS; CHEMICAL COMPOSITION; CONFERENCE PAPER; DIFFUSION; FILM; RADIOFREQUENCY RADIATION; SYNTHESIS; TEMPERATURE DEPENDENCE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037139121 PISSN: 02179792 EISSN: None Source Type: Journal
DOI: 10.1142/s0217979202010981 Document Type: Conference Paper

Times cited : (2)

References (12)

1
- 0031101336
- (1997) J. Phys. D: Appl. Phys. , vol.30 , pp. 944
- Lacerda, M.M.¹ Freire F.L., Jr.² Esteves, J.H.C.R.³ Achete, C.A.⁴

2
- 1342309027
- (1990) J. Appl. Phys. , vol.67 , pp. 566
- Chang, C.-A.¹

3
- 0000156618
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1511
- Ono, H.¹ Nakano, T.² Ohta, T.³

4
- 0000684975
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1736
- Holloway, K.¹ Fryer, P.M.²

5
- 0008988230
- (1992) J. Appl. Phys. , vol.71 , pp. 5433
- Hollyway, K.¹ Fryer, P.M.² Cabral C., Jr.³ Harper, J.M.E.⁴ Bailey, P.J.⁵ Kelleher, K.H.⁶

6
- 0003679027
- Macgraw-Hill Book Co.
- (1988) nd ed.
- Sze, S.M.¹

7
- 20444373328
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

8
- 0000450942
- (2000) J. Phys.: Condensed Matter. , vol.12 , pp. 121
- Xu, S.¹ Kumar, S.² Li, Y.A.³ Jiang, N.⁴ Lee, S.⁵

9
- 0031676692
- (1998) J. Mater. Sci. Lett. , vol.17 , pp. 31
- Li, Y.A.¹ Xu, S.² Li, H.³ Lee, S.⁴ Lou, W.Y.⁵

10
- 0003666012
- John Wiley & Sons, Inc.
- (1994) nd ed.
- Ghandhi, S.K.¹

11
- 12044253618
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalais, J.W.⁵

12
- 0003459529
- Physical Electronics, Inc. Minnesota
- (1992) Handbook of X-ray Photoelectron Spectroscopy
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.