Determination of properties of thin films using x-ray reflectivity

International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 1072-1079

  Rusli, ^a   Chew, K ^a   Yoon, S F ^a   Chan, H K ^a   Ng, C F ^a   Zhang, Q ^a   Ahn, J ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHM; ANALYTIC METHOD; CONFERENCE PAPER; FILM; INTERMETHOD COMPARISON; MATHEMATICAL ANALYSIS; REFLECTOMETRY; SENSITIVITY ANALYSIS; SPECTROSCOPY; SURFACE PROPERTY; THEORETICAL MODEL; X RAY REFLECTIVITY;

EID: 0037139064     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979202010889     Document Type: Conference Paper

References (3)

1. Thin film and surface characterization by specular x-ray reflectivity
2. 2 layers in Si produced by ion-beam synthesis
3. Study of hydrogenated diamond-like carbon films using x-ray reflectivity