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Volumn 956, Issue 1-2, 2002, Pages 109-120
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Ion chromatographic analysis of anions in ammonium hydroxide, hydrofluoric acid, and slurries, used in semiconductor processing
a
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Author keywords
Ammonium hydroxide; Hydrofluoric acid; Inorganic anions
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Indexed keywords
AMMONIUM COMPOUNDS;
CHROMATOGRAPHIC ANALYSIS;
HYDROFLUORIC ACID;
NEGATIVE IONS;
SLURRIES;
ELECTROCHEMICAL NEUTRALIZERS;
ION CHROMATOGRAPHY (IC);
SEMICONDUCTOR MATERIALS;
AMMONIA;
ANION;
CHLORIDE;
HYDROFLUORIC ACID;
HYDROXIDE;
SILICON DIOXIDE;
TRACE ELEMENT;
AMMONIUM HYDROXIDE;
ANALYTIC METHOD;
COLUMN CHROMATOGRAPHY;
CONCENTRATION RESPONSE;
CONDUCTANCE;
CONFERENCE PAPER;
DATA ANALYSIS;
ELECTROCHEMISTRY;
ION PAIR CHROMATOGRAPHY;
MOLECULAR MECHANICS;
PHASE SEPARATION;
PRIORITY JOURNAL;
SAMPLING;
SYSTEM ANALYSIS;
TECHNIQUE;
ARTICLE;
CALIBRATION;
CHEMISTRY;
LIQUID CHROMATOGRAPHY;
METHODOLOGY;
SEMICONDUCTOR;
ANIONS;
CALIBRATION;
CHROMATOGRAPHY, LIQUID;
HYDROFLUORIC ACID;
HYDROXIDES;
SEMICONDUCTORS;
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EID: 0037123459
PISSN: 00219673
EISSN: None
Source Type: Journal
DOI: 10.1016/S0021-9673(02)00396-5 Document Type: Conference Paper |
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Times cited : (18)
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References (13)
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