Structure of multi-oxygen-related defects in erbium-implanted silicon

Journal of Physics Condensed Matter

Volumn 14, Issue 36, 2002, Pages 8537-8547

  Carey, J David ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL DEFECTS; DIMERS; ERBIUM; INFRARED SPECTROSCOPY; ION IMPLANTATION; OXYGEN; PARAMAGNETIC RESONANCE; POSITIVE IONS;

ATOMIC CONFIGURATIONS; INFRARED VIBRATIONAL SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0037120153     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/14/36/310     Document Type: Article

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