Method of measuring the spatial resolution of a photoresist

Optics Letters

Volumn 27, Issue 20, 2002, Pages 1776-1778

  Hoffnagle, J A ^a   Hinsberg, W D ^a   Sanchez, M I ^a   Houle, F A ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORMS; INTERFEROMETRY; LASER BEAMS; OPTICAL TRANSFER FUNCTION; PHOTODIODES;

SPATIAL RESOLUTION;

PHOTORESISTS;

EID: 0037109342     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.27.001776     Document Type: Article

References (7)

1. W. Hinsberg, F.A. Houle, J. Hoffnagle, M. Sanchez, G. Wallraff, M. Morrison, and S. Frank, J. Vac. Sci. Technol. B 16, 3689 (1998).
2. F.A. Houle, W.D. Hinsberg, M.I. Sanchez, and J.A. Hoffnagle, J. Vac. Sci. Technol. B 20, 924 (2002).
3. T.A. Brunner and R.A. Ferguson, Proc. SPIE 2726, 198 (1996).
4. C.A. Mack, Proc. SPIE 2197, 501 (1994).
5. J. Thackeray, T.H. Fedyshyn, D. Kang, M.M. Rajaratnam, G. Wallraff, J. Optiz, and D. Hofer, J. Vac. Sci. Technol. B 14, 4267 (1996).
6. F.A. Houle, W.D. Hinsberg, M. Morrison, M.I. Sanchez, G.M. Wallraff, C.E. Larson, and J.A. Hoffnagle, J. Vac. Sci. Technol. B 18, 1874 (2000).
7. J.A. Hoffnagle, W.D. Hinsberg, M. Sanchez, and F.A. Houle, J. Vac. Sci. Technol. B 17, 3306 (1999).