Characterisation of lanthanum lithium titanate thin films deposited by radio frequency sputtering on [100]-oriented MgO substrates

Thin Solid Films

Volumn 418, Issue 2, 2002, Pages 119-128

  Morales, M ^a   Laffez, P ^a   Chateigner, D ^b   Vickridge, I ^c  

^a UNIVERSITÉ DU MAINE   (France)

^b LABORATOIRE CRISMAT   (France)

^c SORBONNE UNIVERSITÉ   (France)

Author keywords

Epitaxy; Insulators; Oxides; Sputtering

Indexed keywords

COMPOSITION; CRYSTAL MICROSTRUCTURE; EPITAXIAL GROWTH; LANTHANUM COMPOUNDS; MAGNESIA; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY; SPUTTER DEPOSITION; SUBSTRATES; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

RADIO FREQUENCY MAGNETRON SPUTTERING;

THIN FILMS;

EID: 0037109140     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00624-7     Document Type: Article

References (33)

1. Bates J.B., Dudney N.J., Gruzalski G.R., Zuhr R.A., Choudhury A., Luck C.F., Robertson J.D. J. Power Sources. 43/44:1993;103.
2. Fragnaud P., Schleich D.M. Sens. Actuat. A. 51:1995;21.
3. Birke P., Chu W.F., Weppner W. Solid State Ionics. 93:1997;1.
4. Birke P., Weppner W. Electrochim. Acta. 42:1997;3375.
5. C.H. Chen, Ph.D. Thesis, Delft University of Technology, The Netherlands, 1998.
6. Fourquet J.L., Duroy H., Crosnier-Lopez M.P. J. Solid State Chem. 127:1996;283.
7. Ibarra J., Várez A., León C., Santamaría J., Torrez-Martínez L.M., Sanz J. Solid State Ionics. 134:2000;219.
8. Emery J., Buzaré J.Y., Bohnke O., Fourquet J.L. Solid State Ionics. 99:1997;41.
9. Harada Y., Ishigaki T., Kawai H., Kuwano J. Solid State Ionics. 108:1998;407.
10. Alonso J.A., Sanz J., Santamaría J., Léon C., Várez A., Fernandez-Díaz M.T. Angew. Chem. Int. 39:(3):2000;619.
11. Ivanov-Schitz A.K., Kireev V.V., Chaban N.G. Solid State Ionics. 136/137:2000;501.
12. Ban C.W., Choi G.M. Solid State Ionics. 140:2001;285.
13. Emery J., Bonhke O., Fourquet J.L., Buzaré J.Y., Florian P., Massiot D. C.R. Acad. Sci. II-C. 4:2001;845.
14. Inaguma Y., Yu J., Katsumata T., Itoh M. J. Ceram. Soc. Jpn. 105:1997;548.
15. Brousse T., Fragnaud P., Marchand R., Schleich D.M., Bonhke O., West K. J. Power Sources. 68:1997;412.
16. Morcrette M., Gutiérrez-Llorente A., Laurent A., Perrière J., Barboux P., Boilot J.P., Raymond O., Brousse T. Appl. Phys. A. 67:1998;425.
17. Kim I.S., Nakamura T., Inaguma Y., Itoh M. J. Solid State Chem. 113:1994;281.
18. Ricote J., Chateigner D., Pardo L., Alguero M., Mendiola J., Clazada M.L. Ferroelectrics. 241:2000;167.
19. Heizmann J.J., Laruelle C. J. Appl. Crystallogr. 19:1986;467.
20. Ricote J., Chateigner D. Bol. Soc. Española Céram. Vidrio. 38:1999;587.
21. Matthies S., Vinel G.W. Phys. Status Solidi B. 112:1982;K111.
22. GOMAN, INEL France SA Licence 1997; POFINT, 'Pole figure interpretation', CNRS-INEL France SA Licence 2002.
23. Wenk H.-R., Matthies S., Donavan J., Chateigner D. J. Appl. Crystallogr. 31:1998;262.
24. Doolittle L.R. Nucl. Instrum. Methods B. 9:1985;344.
25. Lutterotti L., Wenk H.-R., Matthies S. Szpunar J.A., Textures of Materials. 2:1999;1599-1604 NRC Research Press, Ottawa.
26. Bunge H.-J., Esling C. Bunge H.-J., Esling C., Quantitative Texture Analysis. 1982;DGM, Germany.
27. S. Matthies, G.W. Vinel, K. Helming, Standard Distributions in Texture Analysis, 1, Akademie-Verlag, Berlin, 1987, p. 449.
28. Chateigner D., Erler B. Mater. Sci. Eng. B. 45:1997;152.
29. Kawai H., Kuwano J. J. Electrochem. Soc. 141:1994;L78.
30. MacEachern M.J., Dabkowska H., Garrett J.D., Amow G., Gong W., Liu G., Greedan J.E. Chem. Mater. 6:1994;2092.
31. Várez A., García-Alvarado F., Morá E., Alario-Franco M.A. J. Solid State Chem. 118:1995;78.
32. Chung H.-T., Cheong D.-S. Solid State Ionics. 120:1999;197.
33. D. Chateigner, Ph.D. Thesis, Grenoble University, France, 1994.