Positive-type patterned ZnO films prepared by a chemically modified sol-gel method

Journal of Materials Science Letters

Volumn 21, Issue 18, 2002, Pages 1423-1425

  Kawahara, T ^a   Ishida, T ^b   Tada, H ^b   Tohge, N ^b   Ito, S ^b  

^a NIPPON SHEET GLASS CO LTD   (Japan)

^b KINKI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL MODIFICATION; FILM PREPARATION; IRRADIATION; PHOTOCHEMICAL REACTIONS; SOL-GELS; STRUCTURE (COMPOSITION); SUBSTRATES; THICKNESS MEASUREMENT; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

BENZOYLACETONE; CHEMICALLY MODIFIED SOL-GEL METHOD; ELECTRONIC ABSORPTION SPECTROSCOPY; FILM THICKNESS; SURFACE PROFILOMETER; ULTRA-HIGH PRESSURE MERCURY LAMP; ULTRAVIOLET-VISIBLE SPECTROPHOTOMETER; ZINC ACETATE;

THIN FILMS;

EID: 0037105274     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1019966700345     Document Type: Article

References (13)

1. J. C. DEBSIKBAR, J. Non-Cryst. Solids 86 (1986) 231.
2. Y. ABE, T. GUNJI, Y. KIMATA, M. KURAMATA, A. KASGOZ and T. MISONO, ibid. 121 (1990) 21.
3. F. BABONNEAU, L. COURY and J. LIVAGE, ibid. 121 (1990) 153.
4. R. NASS and H. SCHMIDT, ibid. 121 (1990) 329.
5. N. TOHGE, S. TAKAHASHI and T. MINAMI, J. Amer. Ceram. Soc. 74 (1991) 67.
6. N. TOHGE, K. SHINMOU and T. MINAMI, J. Sol-Gel Sci. Technol. 2 (1994) 581.
7. Idem., Jpn. J. Appl. Phys. 33 (1994) 1181.
8. Idem., J. Ceram. Soc. Jpn. 106 (1998) 183.
9. H. TADA, A. HATTORI, Y. TOKIHISA, K. IMAI, N. TOHGE and S. ITO, J. Phys. Chem. B 104 (2000) 4585.
10. A. HATTORI, Y. TOKIHISA, H. TADA, N. TOHGE, S. ITO, K. HONGO, R. SHIRATSUCHI and G. NOGAMI, J. Sol-Gel. Sci. Technol. 22 (2001) 53.
11. T. KAWAHARA, Y. KONISHI, H. TADA, N. TOHGE and S. ITO, Langmuir 17 (2001) 7442 (2001)
12. Y. OHTA, T. HAGA and Y. ABE, Jpn. J. Appl. Phys. 36 (1997) L1040.
13. JCPDS card No. 36-1451.