Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc

Journal of Applied Physics

Volumn 92, Issue 4, 2002, Pages 1845-1849

  Cheng, Y H ^a   Tay, B K ^b   Lau, S P ^b   Kupfer, H ^c   Richter, F ^c  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AREA FRACTION; CRYSTAL SIZE; FILTERED CATHODIC VACUUM ARC; FILTERED CATHODIC VACUUM ARC TECHNIQUES; LONGITUDINAL ACOUSTIC; OFF-PLANE DOUBLE BENDS; SECOND-ORDER ACOUSTICS; SUBSTRATE BIAS; TIN FILMS; TRANSVERSE OPTICAL MODES;

AMORPHOUS FILMS; FULL WIDTH AT HALF MAXIMUM; METALLIC FILMS; RAMAN SPECTROSCOPY; SUBSTRATES; TITANIUM NITRIDE;

RAMAN SCATTERING;

EID: 0037103447     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1491588     Document Type: Article

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