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Volumn 91, Issue 10 I, 2002, Pages 7953-7955

Enhanced performance of CoFe/AlO x/CoFe magnetic tunnel junctions prepared by an off-axis rf remote plasma oxidation method

(5) Yoon, K S a Park, J H a Yang, J Y a Kim, C O a Hong, J P a

a Hanyang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC OXYGEN; ELECTRICAL BREAKDOWN VOLTAGE; HIGH UNIFORMITY; HIGH-POWER OPERATION; INSULATING BARRIERS; INSULATING LAYERS; MAGNETIC TUNNEL JUNCTION; MAGNETIC TUNNELING JUNCTIONS; OFF-AXIS; OFF-AXIS GEOMETRY; OXIDATION PROCESS; REMOTE OXIDATION; RF PLASMA; RF REMOTE PLASMA; ROOT MEAN SQUARE; SELF BIAS VOLTAGE; STRUCTURAL INFORMATION;

ELECTRIC RESISTANCE; OXIDATION;

MAGNETIC DEVICES;

EID: 0037095273 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1452647 Document Type: Article

Times cited : (10)

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