Thickness measurement of dielectric films by wavelength scanning method

Optics Communications

Volumn 205, Issue 1-3, 2002, Pages 1-6

  Köysal, Oǧuz ^a   Önal, Duygu ^a   Özder, Serhat ^a   Necati Ecevit, F ^a  

^a GEBZE TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Fourier transform; Thickness; Thin films; Transmittance

Indexed keywords

DISCRETE FOURIER TRANSFORMS; MONOCHROMATORS; REFRACTIVE INDEX; THICKNESS MEASUREMENT; THIN FILMS;

TRANSPARENT THIN FILMS;

DIELECTRIC FILMS;

EID: 0037090664     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(02)01203-8     Document Type: Article

References (15)