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Volumn 21, Issue 6, 2002, Pages 469-472
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Positron annihilation studies of electrodeposited copper layers
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CRYSTAL DEFECTS;
CURRENT DENSITY;
ELECTRODEPOSITION;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
MICROSCOPIC EXAMINATION;
PLASTIC DEFORMATION;
POSITRON ANNIHILATION SPECTROSCOPY;
PRESSURE EFFECTS;
TEMPERATURE CONTROL;
THICKNESS MEASUREMENT;
COPPER LAYERS;
LIFETIME SPECTRA;
MICROSCOPIC DEFECTS;
OPEN VOLUME DEFECTS;
VACANCY CLUSTERS;
COPPER;
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EID: 0037088473
PISSN: 02618028
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1015330522646 Document Type: Article |
Times cited : (1)
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References (12)
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