Polysilicon mesoscopic wires coated by Pd as high sensitivity H2 sensors

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 175-180

  Tibuzzi, Arianna ^a,c   Di Natale, Corrado ^a,d   D'Amico, Arnaldo ^a,d   Margesin, Benno ^b   Brida, Sebastiano ^b   Zen, Mario ^b   Soncini, Giovanni ^c  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

^b ITC IRST   (Italy)

^c UNIVERSITY OF TRENTO   (Italy)

^d CNR   (Italy)

Author keywords

Hydrogen sensors; Laser annealing; Mesoscopic wires; Surface micromachining

Indexed keywords

ANNEALING; COATINGS; GAS ADSORPTION; HYDROGEN; LASER APPLICATIONS; MICROELECTRONIC PROCESSING; MICROMACHINING; OXIDATION; PALLADIUM; POLYSILICON; TRANSDUCERS;

HYDROGEN SENSORS; LASER ANNEALING; POLYSILICON MESOSCOPIC WIRES;

CHEMICAL SENSORS;

EID: 0037086023     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01037-1     Document Type: Conference Paper

References (7)

1. Molecular detection based on conductance quantization of nanowires
2. When isn't the conductance of an electron waveguide quantized?
3. Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon
4. Hydrogen sensitive MOS-structures
5. A hydrogen sensitive Pd-gate MOS transistor