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Volumn 56, Issue 4, 2002, Pages 308-314
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Novel method for the plan-view TEM preparation of thin samples on brittle substrates by mechanical and ion beam thinning
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Author keywords
Brittle substrates; Low risk of brake; Plan view thinning; TEM sample preparation
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Indexed keywords
FILM PREPARATION;
GLASS SUBSTRATES;
GLUES;
GLUING;
ION BEAMS;
IONS;
SAPPHIRE;
BREAKINGS;
BRITTLE SUBSTRATES;
ION BEAM THINNING;
LOW RISK OF BRAKE;
MECHANICAL;
NOVEL METHODS;
PLAN-VIEW THINNING;
PREPARATION METHOD;
TEM SAMPLE PREPARATION;
THINNINGS;
MECHANICAL STABILITY;
ARTICLE;
DEVICE;
FILM;
PRIORITY JOURNAL;
RADIATION BEAM;
TECHNIQUE;
THICKNESS;
TISSUE PREPARATION;
TISSUE SECTION;
TRANSMISSION ELECTRON MICROSCOPY;
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EID: 0037083648
PISSN: 1059910X
EISSN: None
Source Type: Journal
DOI: 10.1002/jemt.10034 Document Type: Article |
Times cited : (8)
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References (12)
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