Preparation of diamond films by hot filament chemical vapor deposition and nucleation by carbon nanotubes

Applied Surface Science

Volumn 185, Issue 3-4, 2002, Pages 303-308

  Hou, Ya Qi ^a   Zhuang, Da Ming ^a   Zhang, Gong ^a   Wu, Min Sheng ^a   Liu, Jia Jun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Carbon nanotube; Diamond film; HF CVD; Nucleation precursor

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; GRAIN GROWTH; NUCLEATION; SEMICONDUCTING SILICON;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD);

DIAMOND FILMS;

EID: 0037080079     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00988-6     Document Type: Article

References (13)