Growth and dielectric behavior of radio frequency magnetron-sputtered lead magnesium niobate thin films

Applied Physics Letters

Volumn 81, Issue 20, 2002, Pages 3840-3842

  Jaydeep, Shreekala ^a   Yadav, S ^a   Malla, B P ^a   Kulkarni, Ajit R ^a   Venkatramani, N ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^b Advanced Center For Research in Electronics Mumbai   (India)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTROSTRICTION; GRAIN SIZE AND SHAPE; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PERMITTIVITY; X RAY ANALYSIS;

SCHERRER LINE BROADENING TECHNIQUE;

FERROELECTRIC THIN FILMS;

EID: 0037065036     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1517175     Document Type: Article

References (13)

1. S. Nomura and K. Uchino, Ferroelectrics 50, 197 (1983).
2. D.L. Polla, C. Ye, and T. Tamagawa, Appl. Phys. Lett. 59, 3539 (1991).
3. J.F. Scott and C.A. Araujo, Science 246, 1400 (1989).
4. J.J. Lee, C.L. Thio, and S.B. Desu, J. Appl. Phys. 78, 5073 (1995).
5. Tantigate, J. Lee, and A. Safari, Appl. Phys. Lett. 66, 1611 (1995).
6. M.C. Jiang, T.J. Hong, and T.B. Wu, Jpn. J. Appl. Phys., Part 1 33, 6301 (1994).
7. G.R. Bai, S.K. Streiffer, P.K. Baumann, O. Auciello, K. Ghosh, S. Stemmer, A. Munkholm, C. Thompson, R.A. Rao, and C.B. Eom, Appl. Phys. Lett. 76, 3106 (2000).
8. Catalan, M.H. Corbett, R.M. Bowman, and J.M. Gregg, Appl. Phys. Lett. 74, 3305 (1999).
9. L.F. Francis, Y.-J. Oh, and D.A. Payne, J. Mater. Sci. 25, 5007 (1990).
10. S.L. Swartz and T.R. Shrout, Mater. Res. Bull. 17, 1245 (1982).
11. B.D. Cullity, Elements of X-ray Diffraction (Addison-Wesley, Reading, MA, 1978).
12. M. Desai, J. Dash, I. Samajdar, N. Venkatramani, S. Prasad, P. Kishan, and N. Kumar, J. Magn. Magn. Mater. 231, 108 (2001).
13. A. Pignolet, R.A. Roy, J.P. Doyle, and J.J. Cuomo, J. Vac. Sci. Technol. 12, 2480 (1994).