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Volumn 14, Issue 44 SPEC ISS., 2002, Pages 10973-10977
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New insights into selected-area deposition of diamond films by means of selective seeding
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
MAGNETRON SPUTTERING;
POLYCRYSTALLINE MATERIALS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON;
SUBSTRATES;
HOT FILAMENT CHEMICAL VAPOR DEPOSITION;
SELECTED AREA DEPOSITION;
SELECTIVE SEEDING;
DIAMOND FILMS;
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EID: 0037064751
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/14/44/412 Document Type: Article |
Times cited : (9)
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References (10)
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