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Volumn 129, Issue 1-3, 2002, Pages 105-108
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Investigation of tool geometry in nanometric cutting by molecular dynamics simulation
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Author keywords
Computer simulation; Machining mechanism; Molecular dynamics; Single crystal silicon; Ultraprecision machining
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Indexed keywords
BRITTLENESS;
COMPUTER SIMULATION;
ENERGY DISSIPATION;
INTEGRATED CIRCUITS;
MACHINING;
MOLECULAR DYNAMICS;
SILICON WAFERS;
SINGLE CRYSTALS;
SURFACE ROUGHNESS;
ULTRAPRECISION MACHINING;
CUTTING TOOLS;
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EID: 0037063879
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-0136(02)00585-X Document Type: Conference Paper |
Times cited : (70)
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References (8)
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