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Volumn 129, Issue 1-3, 2002, Pages 105-108

Investigation of tool geometry in nanometric cutting by molecular dynamics simulation

Author keywords

Computer simulation; Machining mechanism; Molecular dynamics; Single crystal silicon; Ultraprecision machining

Indexed keywords

BRITTLENESS; COMPUTER SIMULATION; ENERGY DISSIPATION; INTEGRATED CIRCUITS; MACHINING; MOLECULAR DYNAMICS; SILICON WAFERS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

EID: 0037063879     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(02)00585-X     Document Type: Conference Paper
Times cited : (70)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.