A differential capacitance to voltage converter for electrostatic levitation applications

Sensors and Actuators, A: Physical

Volumn 99, Issue 3, 2002, Pages 249-255

  Han, Fengtian ^a   Gao, Zhongyu ^a   Wang, Yongliang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Capacitive bridges; Differential capacitance sensor; Differential capacitance to voltage converter; Electrostatic levitation; Phase sensitive detector

Indexed keywords

ANALOG TO DIGITAL CONVERSION; BANDWIDTH; ELECTRIC CONVERTERS; ELECTROSTATICS; MAGNETIC LEVITATION; MATHEMATICAL MODELS; POSITION MEASUREMENT; TRANSFER FUNCTIONS;

DIFFERENTIAL CAPACITANCE SENSOR; DIFFERENTIAL CAPACITANCE TO VOLTAGE CONVERTERS; ELECTROSTATIC LEVITATION; PHASE SENSITIVE DETECTOR;

SENSORS;

EID: 0037024451     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00837-8     Document Type: Article

References (8)

1. Electrostatic disturbance forces on a three-axis drag-free sensor
2. Modelling and linearization for long-range spherical gap measurement
3. Capacitive detection scheme for space accelerometers applications
4. A sensitive differential capacitance to voltage converter for sensor applications
5. An interface circuit for high-accuracy signal processing of differential-capacitance transducers
6. A low-cost, smart capacitive position sensor
7. A switched-capacitor interface for capacitive pressure sensors