Adsorption characteristics of organic long chain molecules during physical vapor deposition

Applied Surface Science

Volumn 193, Issue 1-4, 2002, Pages 195-203

  Kubono, Atsushi ^a,b   Yuasa, Norihiko ^a   Shao, Hui Li ^a   Umemoto, Susumu ^a   Okui, Norimasa ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Adsorption energy; Average lifetime; Chemisorption; Physisorption; Quartz crystal microbalance; Vapor deposition

Indexed keywords

CHEMISORPTION; MOLECULES; PHYSICAL VAPOR DEPOSITION; POLYMERIZATION; QUARTZ;

QUARTZ CRYSTAL MICROBALANCE;

ADSORPTION;

EID: 0037024022     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00292-1     Document Type: Article

References (26)