|
|
Volumn 14, Issue 3, 2002, Pages 218-221
|
|
Metal silicide/silicon nanowires from metal vapor vacuum arc implantation
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL LATTICES;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTRIC CONTACTS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
HIGH RESOLUTION ELECTRON MICROSCOPY;
ION IMPLANTATION;
ION SOURCES;
METAL VAPOR LAMPS;
RAPID THERMAL ANNEALING;
SEMICONDUCTING SILICON;
SILICA;
SURFACE ROUGHNESS;
THERMAL EFFECTS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
METAL VAPOR VACUUM ARCS (MEVVA);
SELECTED AREA DIFFRACTION PATTERNS (SAED);
NANOSTRUCTURED MATERIALS;
|
|
EID: 0037022376
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-4095(20020205)14:3<218::AID-ADMA218>3.0.CO;2-7 Document Type: Article |
|
Times cited : (36)
|
|
References (13)
|
