GaAlAs/GaAs micromachined thermally tunable vertical cavity filter with low tuning voltage

Electronics Letters

Volumn 38, Issue 14, 2002, Pages 738-740

  Amano, T ^a   Koyama, F ^a   Arai, M ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; LASER TUNING; LIGHT POLARIZATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR LASERS; THERMAL EXPANSION;

DISTRIBUTED BRAGG REFLECTORS; GALLIUM ALUMINUM ARSENIDE; THERMAL STRAIN CONTROL; VERTICAL CAVITY FILTER; VERTICAL CAVITY SURFACE EMITTING LASERS;

OPTICAL FILTERS;

EID: 0037019214     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20020490     Document Type: Article

References (4)

1. Vertical coupled-cavity micro interferometer on GaAs with deformable membrance top mirror
2. GaAs micromachined widely tunable Fabry-Perot filter
3. Wavelength stabilization and trimming technologies for vertical-cavity surface emitting laser arrays
4. Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter