Finite element modelling of stress development during deposition of ion assisted coatings

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 269-274

  Ward, D J ^a   Arnell, R D ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Coating stresses; Finite element simulation; Ion assisted physical vapour deposition

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; ION BOMBARDMENT; PROTECTIVE COATINGS; RESIDUAL STRESSES; THERMAL STRESS; TRIBOLOGY;

SURFACE COATINGS;

PHYSICAL VAPOR DEPOSITION;

EID: 0037011097     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00934-3     Document Type: Conference Paper

References (11)

1. D'Heurle F.M. Metall. Trans. 1:1970;725.
2. Carter G. J. Appl. Phys. 27:1994;1046.
3. Martynenko Yu.V., Carter G. Radiation Effects Defects Solids. 132:1994;1.
4. Windischmann H. J. Appl. Phys. 62:1987;1800.
5. Seitz F., Koehler J.S. Solid State Physics. 2:1956;251.
6. Davis C.A. Thin Solid Films. 226:1993;30.
7. Ljungcrantz H., Hultman L., Sundgren J.-E., Karlson L. J. Appl. Phys. 78:(2):1995;832.
8. McKenzie D.R., Muller D.A., Pailthorpe B.A. Phys. Rev. Lett. 67:1991;773.
9. Martin P.J., Netterfield R.P., Kinder T.J., Bendavid A. Surf. Coat. Technol. 70:1994;97.
10. Klockholm E., Berry B.S. J. Electrochem. Soc. 118:1968;824.
11. Thornton J.A., Hoffman D.W. Thin Solid Films. 171:1989;5.